Repair Services
A wide range of service support and fabrication operation: RF&PWS , Robots, Lasers, PCB, Valves, Pumps, Chillers, Coating
RF/RPS/Match /Microwave Repair
RF/RPS/Power Supply
- Provide high efficiency, high quality service, short Lead Time .
- Price Competitiveness
- Lab Equips 20 Testing / Evaluation / Assembly lines for RF power system, and our testing platforms are able to perform the most of evaluation requirements, including direct current, RF, microwave, network adaptor, remote plasma source, etc.
RF Support for The Following
Refurbishment / Recycle of SiC Ring
- Same performance vs. OEM products
- Low cost due to manufacturing innovation
- Eco-friendly Technology; saving energy Huge Cost saving to customer
Wycom CVD SiC Components Application
To maximize operation time of etching system, process parts which have short MTBC time arechanging from Si, Quartz to CVD SiC material.
Wycom CVD SiC Parts include SiC focus ring, upper ring and electrode.
| No. | Part | Meterial | *MTBC |
|---|---|---|---|
| 1 | View Port | Quartz | --- |
| 2 | Baffle | Si, SiC | 6M ~ 1Y |
| 3 | Electrode | Si, SiC | 500 hrs. |
| 4 | Upper Ring | Quartz, SiC | 300 hrs. |
| 5 | Upper Confinement Ring | Quartz | 500 hrs. |
| 6 | Lower Confinement Ring | Quartz | 500 hrs. |
| 7 | Hot Edge Ring | Si, SiC | 150 hrs. |
| 8 | Insulator Pipe | Quartz | 500 hrs. |
| 9 | Inner Focus Ring | Al203, SiC | 300 hrs. |
| 10 | Outher Focus Ring | Al203, SiC | 300 hrs. |
| 11 | Lift Pin | Al203 | --- |
| 12 | Electrostatic (ESC) | --- | --- |
| 13 | Bottom Insulator | Al203 | --- |
* MTBC : Mean Time Before Cleaning
PCB Boards Repair
Component level board repair
- Support Variety of PCB and PCBA boards on component level
- ASML board repair
- Video Board
- Touch Screen
- Temp Control board
Robots repair & refurbished
Robot Repair
- Wide variety of Robots
- Attractive Prices
- Short Repair loop
- PRI, ROZE, BROOKS, Kawasaki.
Robot Repair
- MTR 5 Robot
- Vacuum Robot _ VHP
- Vacuum Robot _ HP
- Mag 7 & Others
Provide high efficiency, high-quality service, short lead time.
For variety servo motors and controller.
Servo Motors & Controllers
Provide high efficiency, high-quality service, short lead time.
For variety servo motors and controller.
Pumps Repair & Supply
- Maintenance, repair, and overhaul of dry vacuum pumps - Expert on EBARA pumps
- Many years of experience in the vacuum field
- Large dry vacuum pump portfolio
- Turbo pump refurbishment
- Cryo Pumps refurbishment
- Supply of pumps
- Provide high efficiency, high-quality service, short lead time.
- Price Competitiveness
Laser Support
Laser repair & supply
Service include repair program & new OPM supply laser units for tools such as:
Metrology, Photo, Inspection, Production tools, New OPM supply lasers for KLA SP1 TBI Tool, AIT XP+ Tool.
Laser repair loop
Metron working with reliable lab supporting the following laser manufactures.
The lab has a long, professional history supporting Intel
- JDSU
- COHERENT
- EDGEWAVE
- PHOTONIC INDUSRIES
- SPECRA PHYSICS
- TIME BANDWITH
- Price Competitiveness
Laser repair loop Nikon/ASML lasers
- ZYGO LASER HEAD
- Z4203(AOM) 300mm WGA Pre for
- NIKON /ASML
- 5517 A 150mm for ASML
- 5517 B 200mm
- 5517 C 200mm
- 5517 D 200mm
Valves Repair
- Isolation Valve
- ISO Valve
- L/L slit valve
- Throttle Valve
- Gate valve
Chiller Repair
- Maintenance, repair, and overhaul of chillers
- Large chillers portfolio
- Offers repair and refurbishment for chillers and heat exchangers, including Neslab, SMC, Bay Voltex, Edwards, lam / M&W, AMAT, Daikin
- Support legacy chillers
- Provide high efficiency, high-quality service, short lead time
- Price Competitiveness
Coating
- NC (Nano Coating) process
- APS (Atmospheric Plasma Spray) Coating
- Y2O3, YAG, Si, Al2O3, Etc High temp (10,000~15,000K) APS Coating
Veporizer/Liquid Injection System Repair
Horiba STEC Injection Valve / LFM / LFC
