Parts Support
A Wide Fabrication Solution Parts Management
- Spare parts management โ consignment stock at the customer site
- OPM parts support
- Alternate source parts
- Consumables parts
OPM Parts for Novellus C1
OPM spare parts for:
- GaSonics
- Speedfam/IPEC
- Novellus Concept One
Face Plate & Shower Head
Shower head/face plate PVD/CVD
- AMAT
- LAM/Novellus
- ASM
- Sic Shower Head
RTP LAMPS
Alternate source of parts
- Supply New RTP Lamps , Improve design , longer life time ,attractive cost
- 200mm RTP lamp (Black)
- 300mm RTP Radiance (Blue)
- RTP Radiance Plus (Red)
O-Rings
O-rings support
- O-Rings for TEL, LAM, Novellus, AMAT systems
- Bonded slit door
- General application
- High plasma resistance perfluoro
- High temp. resistance perfluoro
Quarts & Silicon
Alternate source of parts
- Alternate source parts made ofโ Quartz, silicon, graphite, sic, ceramic suppliers
- Single crystal silicon, ceramics for TEL, AMAT, LAM, Novellus
- Silicon parts (focus ring, upper electrode)
- Chamber parts (anodized, coating, ceramic, quartz)
Alternate Y2O3 parts
Provide cost saving alternate Y2O3 parts for:
- Top liner
- Focus ring
- Process ring
- Producer ring
- Others
