Electrostatic (ESC) & Heater Refurbishment and Manufacture
Repairing and refurbishing Electrostatic & Heater polyamide, AI, Ceramic, Anodize
Service Provide to:
- Electrostatic (ESC) Chuck- LAM /Novellus , AMAT , TEL
- Electrostatic (ESC) LAM Hydra Model
- Metal Heater/Pedestal -New & Repair
- AlN Heater (Aluminum Nitride Heater) - New
- RTP Lamp Housing - New
- Metal Shower Head - New
- Heater Focus Ring
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ESC- Problem Solving
The purpose of ESC refurbishment is to solve the following common problems:
- Wafer-sticking
- Helium Leak
- Leak Current High
- Arcing
- Voltage unstable
- WAT NG
- CD abnormal
- CD Yeild Lost
ESC & Pedestal ETCH/CVD/IMP/METAL
Repair & refurbishment services
- Polyimide ESC & Heater
- Aluminum Heater (AMAT, ASM)
- Anodized ESC
- Ceramic ESC
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Product Offering
AMAT
LAM 1
LAM 2
LAM 3
LAM 4
Novellus
Tel
Ulvac
APTC
AMAT
LAM 1
LAM 2
LAM 3
LAM 4
Novellus
Tel
Ulvac
APTC
