ESC & Heater Refurbishment and Manufacture
Repairing and refurbishing ESC & Heater polyamide, AI, Ceramic, Anodize
Service Provide to:
- Metal Heater/Pedestal -New & Repair
- AlN Heater (Aluminum Nitride Heater)
- ESC (Electro Static Chuck)- LAM /Novellus , AMAT , TEL
- N2 Shield, Hot N2 - New
- RTP Lamp Housing - New
- Metal Shower Head - New
- Heater Focus Ring
ESC- Problem Solving
The purpose of ESC refurbishment is to solve the following common problems:
- Wafer-sticking
- Helium Leak
- Leak Current High
- Arcing
- Voltage unstable
- WAT NG
- CD abnormal
- CD Yeild Lost
ESC & Pedestal ETCH/CVD/IMP/METAL
Repair & refurbishment services
- Polyimide ESC & Heater
- Aluminum Heater (AMAT, ASM)
- Anodized ESC
- Ceramic ESC
