Parts Support
Fab wide Solution Parts Management
Spare parts management- consignment stock at customer site
OPM parts support
Alternate source parts
Consumables parts
OPM Parts for Novellus C1
Concept solution is the OEM spare parts for:
- GaSonics
- Speedfam/IPEC
- Novellus Concept One
Face Plate & Shower Head
Shower head/face plate PVD/CVD
- AMAT– various tools
- Novellus
- ASM
Orings
Orings support
O-Rings for TEL, LAM, Novellus, AMAT systems
Bonded slit door
General application
High plasma resistance perfluoro
High temp. resistance perfluoro
Quarts & Silicon
Alternate source of parts
- Alternate source parts made of– Quartz, silicon, graphite, sic, ceramic suppliers
- Single crystal silicon, ceramics for TEL, AMAT, LAM, Novellus
- Silicon parts (focus ring, upper electrode)
- Chamber parts (anodized, coating, ceramic, quartz)
Alternate Y2O3 parts
Provide cost saving alternate Y2O3 parts for:
- Top liner
- Focus ring
- Process ring
- Producer ring
