ESC & Heater Refurbishment and Manufacture

Service provide to:

  • Metal Heater
  • AlN Heater (Aluminum Nitride Heater)
  • ESC (Electro Static Chuck)
  • Heat Jacket & Controller
  • Valve (Manual & Auto Protection)
  • N2 Shield, Hot N2
  • RTP Lamp Housing
  • Metal Shower Head

 

ESC- Problem Solving

The purpose of ESC refurbishment is to solve the following common problems:

  • Wafer-sticking
  • Helium Leak
  • Leak Current High
  • Arcing
  • Voltage unstable
  • Process abonormal
  • WAT NG
  • CD abnormal
  • Yeild Lost

ESC & heater ETCH/CVD/IMP/METAL

Repair & refurbishment services

  • Polyimide ESC & Heater
  • Aluminum Heater (AMAT, ASM)
  • Anodized ESC
  • Ceramic ESC