Equipment

Semiconductor Used Equipment

Support the following area

  • Microlithography
  • Surface Conditioning 
  • Inspection and Metrology
  • Cleaning equipment
  • CVDs
  • RTPs
  • Etching
  • Backend

      

SemiLab Metrology Tools & Ellipsometer

University & Production tools Thermal Treatment

  • University & Production tools Thermal Treatment
    –Metallic contamination
    –Non-Contact CV for HighK/dielectric
  • Dry Etch
    –High aspect ration DTI (depth, TCD, BCD)
  • Thin Films
    –Thickness / Optical properties
    –Ge% / Boron dose / As dose (SiGe/SiCP) FD-SOI/FinFET
  • Ion Implant
    –Dose monitoring
    –Junction leackage EPI
    –Resistivity (map/profile)
    –EPI thickness